Physical Scaling Limits of FinFET Structure: A Simulation Study
نویسندگان
چکیده
منابع مشابه
Physical Scaling Limits of FinFET Structure: A Simulation Study
In this work an attempt has been made to analyze the scaling limits of Double Gate (DG) underlap and Triple Gate (TG) overlap FinFET structure using 2D and 3D computer simulations respectively. To analyze the scaling limits of FinFET structure, simulations are performed using three variables: finthickness, fin-height and gate-length. From 2D simulation of DG FinFET, it is found that the gate-le...
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ژورنال
عنوان ژورنال: International Journal of VLSI Design & Communication Systems
سال: 2011
ISSN: 0976-1357
DOI: 10.5121/vlsic.2011.2103